"Design, prototyping, modeling and control of a MEMS nanopositioning stage."

Y. Zhu et al. (2011)

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DOI: 10.1109/ACC.2011.5991449

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-08

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Y. Zhu, Ali Bazaei, S. O. Reza Moheimani, Mehmet R. Yuce:
Design, prototyping, modeling and control of a MEMS nanopositioning stage. ACC 2011: 2278-2283

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