"Control design for a 6 DOF e-beam lithography stage."

Pai-Hsueh Yang, Brian Alamo, Gerry B. Andeen (2001)

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DOI: 10.1109/ACC.2001.946086

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-05

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Pai-Hsueh Yang, Brian Alamo, Gerry B. Andeen:
Control design for a 6 DOF e-beam lithography stage. ACC 2001: 2255-2260

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