"Control performance assessment and diagnosis for semiconductor processes."

Jin Wang, Q. Peter He, Thomas F. Edgar (2010)

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DOI: 10.1109/ACC.2010.5531333

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-23

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Jin Wang, Q. Peter He, Thomas F. Edgar:
Control performance assessment and diagnosis for semiconductor processes. ACC 2010: 7004-7009

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