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"A literature review on modeling and control design for electrostatic ..."

Marialena Vagia, Anthony Tzes (2010)

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DOI: 10.1109/ACC.2010.5530894

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-23

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Marialena Vagia, Anthony Tzes:
A literature review on modeling and control design for electrostatic microactuators with fringing and squeezed film damping effects. ACC 2010: 3390-3402

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