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"Smart MEMS: micro-structures with error-suppression and self-calibration ..."

Andrei M. Shkel (2001)

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DOI: 10.1109/ACC.2001.945886

access: closed

type: Conference or Workshop Paper

metadata version: 2022-04-09

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Andrei M. Shkel:
Smart MEMS: micro-structures with error-suppression and self-calibration control capabilities. ACC 2001: 1208-1213

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