"New modeling and control framework for MEMS characterization utilizing ..."

Reza Saeidpourazar, Nader Jalili (2008)

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DOI: 10.1109/ACC.2008.4587079

access: closed

type: Conference or Workshop Paper

metadata version: 2020-07-09

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Reza Saeidpourazar, Nader Jalili:
New modeling and control framework for MEMS characterization utilizing piezoresistive microcantilever sensors. ACC 2008: 3761-3766

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