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"Cross-coupling effect compensation of an AFM piezoelectric tube scanner ..."

M. S. Rana, Hemanshu Roy Pota, Ian R. Petersen (2014)

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DOI: 10.1109/ACC.2014.6859357

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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M. S. Rana, Hemanshu Roy Pota, Ian R. Petersen:
Cross-coupling effect compensation of an AFM piezoelectric tube scanner for improved nanopositioning. ACC 2014: 2456-2461

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