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"A method for real-time control of thin film composition using OES and XPS."
Dong Ni et al. (2003)
- Dong Ni, Yiming Lou, Panagiotis D. Christofides, Lin Sha, Sandy Lao, Jane P. Chang:
A method for real-time control of thin film composition using OES and XPS. ACC 2003: 1320-1327

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