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"Design and control of a single-chip SOI-MEMS atomic force microscope."
Mohammad Maroufi et al. (2017)
- Mohammad Maroufi, Michael G. Ruppert, Anthony G. Fowler, S. O. Reza Moheimani:
Design and control of a single-chip SOI-MEMS atomic force microscope. ACC 2017: 2869-2874
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