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"AFM Tip Localization on Large Range Sample Using Particle Filter for MEMS ..."

Yi-Lin Liu et al. (2020)

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DOI: 10.23919/ACC45564.2020.9147562

access: closed

type: Conference or Workshop Paper

metadata version: 2020-08-05

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  dblp key:
  - conf/amcc/LiuHHCF20
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Yi-Lin Liu, Kuan-Wei Huang, Ching-Chi Huang, Huang-Chih Chen, Li-Chen Fu:
AFM Tip Localization on Large Range Sample Using Particle Filter for MEMS Inspection. ACC 2020: 577-582

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