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"Two degree of freedom control for nanopositioning systems: Fundamental ..."

Chibum Lee, Srinivasa M. Salapaka (2009)

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DOI: 10.1109/ACC.2009.5160185

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-06

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Chibum Lee, Srinivasa M. Salapaka:
Two degree of freedom control for nanopositioning systems: Fundamental limitations, control design, and related trade-offs. ACC 2009: 1664-1669

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