"Multiscale modeling of atomic layer deposition processes."

Vivek Dwivedi, Raymond A. Adomaitis (2009)

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DOI: 10.1109/ACC.2009.5160582

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-06

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Vivek Dwivedi, Raymond A. Adomaitis:
Multiscale modeling of atomic layer deposition processes. ACC 2009: 2495-2500

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