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"Feedback controller design considering plant dynamics of table drive ..."

Kazuaki Ito et al. (2012)

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DOI: 10.1109/AMC.2012.6197111

access: closed

type: Conference or Workshop Paper

metadata version: 2021-04-09

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Kazuaki Ito, Yuichi Katsuki, Wataru Maebashi, Makoto Iwasaki:
Feedback controller design considering plant dynamics of table drive system in microscopic displacement region. AMC 2012: 1-5

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