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"Multi-axis Active Vibration Suppression for Wafer Transfer Systems."
Jiajie Qiu et al. (2023)
- Jiajie Qiu, Hongjin Kim, Fangzhou Xia, Kamal Youcef-Toumi:
Multi-axis Active Vibration Suppression for Wafer Transfer Systems. AIM 2023: 1108-1114
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