"Improvement of sawtooth shape generated by anisotropic etching process of ..."

Atsushi Mitani et al. (2013)

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DOI: 10.1109/AIM.2013.6584219

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Atsushi Mitani, Hoai Phuong Le, Yasutaka Matsuo, Shinichi Hirai:
Improvement of sawtooth shape generated by anisotropic etching process of single-crystal silicon for microparts feeding using horizontal and symmetric vibrations. AIM 2013: 967-972

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