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"Modeling and Control of a Six-Axis Parallel Piezo-Flexural ..."
Shengzheng Kang et al. (2020)
- Shengzheng Kang, Hongtao Wu, Shengdong Yu, Yao Li, Xiaolong Yang, Jiafeng Yao:
Modeling and Control of a Six-Axis Parallel Piezo-Flexural Micropositioning Stage With Cross-Coupling Hysteresis Nonlinearities. AIM 2020: 1350-1355
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