"Hybrid Reluctance Actuator to Compensate for Parasitic Force for ..."

Shingo Ito, Atsuki Yamashita, Kazuki Takahashi (2024)

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DOI: 10.1109/AIM55361.2024.10637043

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-31

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Shingo Ito, Atsuki Yamashita, Kazuki Takahashi:
Hybrid Reluctance Actuator to Compensate for Parasitic Force for Nanopositioning. AIM 2024: 26-31

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