"Modeling and Analysis of Flexure-based Nano-Positioning Device Driven by ..."

Xiaolu Huang et al. (2018)

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DOI: 10.1109/AIM.2018.8452357

access: closed

type: Conference or Workshop Paper

metadata version: 2019-02-04

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Xiaolu Huang, Bao Yang, Chi Zhang, Silu Cherr, Jinhua Chen, Youyong Liao:
Modeling and Analysis of Flexure-based Nano-Positioning Device Driven by Voice Coil Actuator. AIM 2018: 563-568

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