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"Wafer-scale automation of electron beam induced depositions."

Patrick Elfert, Malte Bartenwerfer, Sergej Fatikow (2016)

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DOI: 10.1109/AIM.2016.7576792

access: closed

type: Conference or Workshop Paper

metadata version: 2018-01-10

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  - conf/aimech/ElfertBF16
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  - https://dblp.org/rec/conf/aimech/ElfertBF16
Patrick Elfert, Malte Bartenwerfer, Sergej Fatikow:
Wafer-scale automation of electron beam induced depositions. AIM 2016: 351-356

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