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"Shape behavior analysis of a PMN-PT [001] actuated MOEMS micro-mirror."

Dragos Adrian Ciubotariu et al. (2015)

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DOI: 10.1109/AIM.2015.7222575

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-02

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Dragos Adrian Ciubotariu, Cédric Clévy, Ioan Alexandru Ivan, Philippe Lutz:
Shape behavior analysis of a PMN-PT [001] actuated MOEMS micro-mirror. AIM 2015: 453-458

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