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"Structure design and trajectory planning of a precision ..."

Han Chen et al. (2014)

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DOI: 10.1109/AIM.2014.6878187

access: closed

type: Conference or Workshop Paper

metadata version: 2020-09-02

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  - conf/aimech/ChenHMZCZ14
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Han Chen, Chuxiong Hu, Haihua Mu, Yu Zhu, Tian Cai, Ming Zhang:
Structure design and trajectory planning of a precision repetitive-scanning stage with separated drive units for heat-reduction. AIM 2014: 859-564

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