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"Micro-vibration Measurement: How Best for Piezo-driven Flexure-guided Stages."

Zhong Chen, Zhipeng Li, Xianmin Zhang (2019)

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DOI: 10.1109/AIM.2019.8868383

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-24

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  dblp key:
  - conf/aimech/0002LZ19
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  persistent URL:
  - https://dblp.org/rec/conf/aimech/0002LZ19
Zhong Chen, Zhipeng Li, Xianmin Zhang:
Micro-vibration Measurement: How Best for Piezo-driven Flexure-guided Stages. AIM 2019: 1043-1048

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