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"Micro-vibration Measurement: How Best for Piezo-driven Flexure-guided Stages."
Zhong Chen, Zhipeng Li, Xianmin Zhang (2019)
- Zhong Chen, Zhipeng Li, Xianmin Zhang:
Micro-vibration Measurement: How Best for Piezo-driven Flexure-guided Stages. AIM 2019: 1043-1048
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