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"Modeling and Distributed Control of an Electrostatically Actuated ..."

Azeem Sarwar, Petros G. Voulgaris, Srinivasa M. Salapaka (2007)

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DOI: 10.1109/ACC.2007.4283093

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-30

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Azeem Sarwar, Petros G. Voulgaris, Srinivasa M. Salapaka:
Modeling and Distributed Control of an Electrostatically Actuated Microcantilever Array. ACC 2007: 4240-4245

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