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"Induced Stress Enhancement Using U-shaped Arms in a 3-Axis Piezoresistive ..."

M. Hadi Said et al. (2018)

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DOI: 10.1109/SSD.2018.8570360

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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  dblp key:
  - conf/IEEEssd/SaidTMAPPDBR18
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  - https://dblp.org/rec/conf/IEEEssd/SaidTMAPPDBR18
M. Hadi Said, Fares Tounsi, Brahim Mezghani, Aftab Ahmed, Shardul Pandit, Rajul Patkar, Pradeep Dixit, M. S. Baghin, V. Ramgopal Rao:
Induced Stress Enhancement Using U-shaped Arms in a 3-Axis Piezoresistive MEMS Accelerometer. SSD 2018: 1481-1486

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