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"Induced Stress Enhancement Using U-shaped Arms in a 3-Axis Piezoresistive ..."
M. Hadi Said et al. (2018)
- M. Hadi Said, Fares Tounsi
, Brahim Mezghani
, Aftab Ahmed
, Shardul Pandit, Rajul Patkar, Pradeep Dixit
, M. S. Baghin, V. Ramgopal Rao:
Induced Stress Enhancement Using U-shaped Arms in a 3-Axis Piezoresistive MEMS Accelerometer. SSD 2018: 1481-1486
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