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"Modal analysis of MEMS using ultrasonic base excitation."

Steven Kehrberg et al. (2012)

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DOI: 10.1109/SSD.2012.6198033

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  dblp key:
  - conf/IEEEssd/KehrbergWGM12
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  - https://dblp.org/rec/conf/IEEEssd/KehrbergWGM12
Steven Kehrberg, Patrick Wellner, Carsten Geckeler, Jan Mehner:
Modal analysis of MEMS using ultrasonic base excitation. SSD 2012: 1-4

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