"Induced-Stress Analysis of SU-8 Polymer Based Single Mass 3-Axis ..."

Aftab Ahmed et al. (2019)

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DOI: 10.1109/SSD.2019.8893246

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Aftab Ahmed, Shardul Pandit, Rajul Patkar, Pradeep Dixit, Maryam Shojaei Baghini, Awatef Khlifi, Fares Tounsi, Brahim Mezghani:
Induced-Stress Analysis of SU-8 Polymer Based Single Mass 3-Axis Piezoresistive MEMS Accelerometer. SSD 2019: 131-136

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