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"Optimal Detector Position and Structure for a New 3-axis CMOS Thermal ..."

Sonia Abdellatif et al. (2020)

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DOI: 10.1109/SSD49366.2020.9364127

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Sonia Abdellatif, Brahim Mezghani, Frédérick Mailly, Pascal Nouet:
Optimal Detector Position and Structure for a New 3-axis CMOS Thermal Microaccelerometer. SSD 2020: 1144-1149

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