"Multimodal control of a microrobot in an SEM-based nanohandling station."

Sergej Fatikow et al. (2003)

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DOI: 10.1109/ISIC.2003.1254754

access: closed

type: Conference or Workshop Paper

metadata version: 2024-09-04

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Sergej Fatikow, Aleksandr Shirinov, Helge Hülsen, Stefan Garnica:
Multimodal control of a microrobot in an SEM-based nanohandling station. ISIC 2003: 890-895

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