"A Low-Cost and Low-Temperature Method to Realize Carbon Nanotube Conductor ..."

Ziyue Zhang et al. (2021)

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DOI: 10.1109/3DIC52383.2021.9687607

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-07

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Ziyue Zhang, Yingtao Ding, Baoyan Yang, Anrun Ren, Zhiming Chen:
A Low-Cost and Low-Temperature Method to Realize Carbon Nanotube Conductor in Through-Silicon-Via. 3DIC 2021: 1-4

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