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"Low cost polyimide liner formation with vacuum-assisted spin coating for ..."

Yangyang Yan et al. (2016)

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DOI: 10.1109/3DIC.2016.7970040

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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  - conf/3dic/YanZCZCD16
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  - https://dblp.org/rec/conf/3dic/YanZCZCD16
Yangyang Yan, Ziyue Zhang, Zhiqiang Cheng, Lingfeng Zhou, Zhiming Chen, Yingtao Ding:
Low cost polyimide liner formation with vacuum-assisted spin coating for through-silicon-vias. 3DIC 2016: 1-5

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