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"Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs ..."
Yangyang Yan et al. (2015)
- Yangyang Yan, Yingtao Ding, Qianwen Chen, Kang Wook Lee, Takafumi Fukushima
, Mitsumasa Koyanagi:
Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs applications. 3DIC 2015: TS5.2.1-TS5.2.5
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