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"An ultra-fast temporary bonding and release process based on thin ..."

Tsung-Yen Tsai et al. (2015)

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DOI: 10.1109/3DIC.2015.7334613

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-16

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Tsung-Yen Tsai, Chien-Hung Lin, Chia-Lin Lee, Shan-Chun Yang, Kuan-Neng Chen:
An ultra-fast temporary bonding and release process based on thin photolysis polymer in 3D integration. 3DIC 2015: TS8.8.1-TS8.8.5

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