"Fabrication and Morphological Characterization of Nano-Scale Interconnects ..."

Mariappan Murugesan et al. (2019)

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DOI: 10.1109/3DIC48104.2019.9058849

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Mariappan Murugesan, Mitsumasa Koyanagi, Hiroyuki Hashimoto, Ji Chel Bea, Takafumi Fukushima:
Fabrication and Morphological Characterization of Nano-Scale Interconnects for 3D-Integration. 3DIC 2019: 1-4

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