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"Air-gap/SiO2 liner TSVs with improved electrical performance."

Cui Huang et al. (2015)

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DOI: 10.1109/3DIC.2015.7334612

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Cui Huang, Dong Wu, Liyang Pan, Zheyao Wang:
Air-gap/SiO2 liner TSVs with improved electrical performance. 3DIC 2015: TS8.7.1-TS8.7.5

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