"A Vacuum-compatible X-Y Microactuator using the Levitational Effect of a ..."

Yoshihiko Maeda, Kazuyuki Aihara, Hiroyuki Fujita (1993)

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DOI: 10.1016/B978-0-444-89700-8.50084-1

access: closed

type: Part in Book or Collection

metadata version: 2020-05-27

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