BibTeX record phd/ndltd/Fan12

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@phdthesis{DBLP:phd/ndltd/Fan12,
  author       = {Wei Fan},
  title        = {Advanced modeling of planarization processes for integrated circuit
                  fabrication},
  school       = {Massachusetts Institute of Technology, Cambridge, MA, {USA}},
  year         = {2012},
  url          = {https://hdl.handle.net/1721.1/78446},
  timestamp    = {Wed, 04 May 2022 12:58:42 +0200},
  biburl       = {https://dblp.org/rec/phd/ndltd/Fan12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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