BibTeX record journals/tsmc/YangWQZL17

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@article{DBLP:journals/tsmc/YangWQZL17,
  author       = {FaJun Yang and
                  Naiqi Wu and
                  Yan Qiao and
                  MengChu Zhou and
                  ZhiWu Li},
  title        = {Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition
                  Process With Residency Time Constraints},
  journal      = {{IEEE} Trans. Syst. Man Cybern. Syst.},
  volume       = {47},
  number       = {3},
  pages        = {502--516},
  year         = {2017},
  url          = {https://doi.org/10.1109/TSMC.2015.2507140},
  doi          = {10.1109/TSMC.2015.2507140},
  timestamp    = {Fri, 29 Apr 2022 15:37:30 +0200},
  biburl       = {https://dblp.org/rec/journals/tsmc/YangWQZL17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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