BibTeX record journals/tsmc/QiaoWYZZ18

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@article{DBLP:journals/tsmc/QiaoWYZZ18,
  author    = {Yan Qiao and
               Naiqi Wu and
               FaJun Yang and
               MengChu Zhou and
               Qinghua Zhu},
  title     = {Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm
               Cluster Tools With Wafer Revisiting and Activity Time Variation},
  journal   = {{IEEE} Trans. Systems, Man, and Cybernetics: Systems},
  volume    = {48},
  number    = {4},
  pages     = {622--636},
  year      = {2018},
  url       = {https://doi.org/10.1109/TSMC.2016.2600583},
  doi       = {10.1109/TSMC.2016.2600583},
  timestamp = {Wed, 11 Apr 2018 09:53:31 +0200},
  biburl    = {https://dblp.org/rec/bib/journals/tsmc/QiaoWYZZ18},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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