BibTeX record journals/tcad/PichlerJSGP85

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@article{DBLP:journals/tcad/PichlerJSGP85,
  author       = {Peter Pichler and
                  Werner J{\"{u}}ngling and
                  Siegfried Selberherr and
                  Edgar Guerrero and
                  Hans W. P{\"{o}}tzl},
  title        = {Simulation of Critical IC-Fabrication Steps},
  journal      = {{IEEE} Trans. Comput. Aided Des. Integr. Circuits Syst.},
  volume       = {4},
  number       = {4},
  pages        = {384--397},
  year         = {1985},
  url          = {https://doi.org/10.1109/TCAD.1985.1270136},
  doi          = {10.1109/TCAD.1985.1270136},
  timestamp    = {Thu, 24 Sep 2020 11:27:20 +0200},
  biburl       = {https://dblp.org/rec/journals/tcad/PichlerJSGP85.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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