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BibTeX record journals/sensors/NiYXZZLXL13
@article{DBLP:journals/sensors/NiYXZZLXL13, author = {Zao Ni and Chen Yang and Dehui Xu and Hong Zhou and Wei Zhou and Tie Li and Bin Xiong and Xinxin Li}, title = {Monolithic Composite "Pressure + Acceleration + Temperature + Infrared" Sensor Using a Versatile Single-Sided "SiN/Poly-Si/Al" Process-Module}, journal = {Sensors}, volume = {13}, number = {1}, pages = {1085--1101}, year = {2013}, url = {https://doi.org/10.3390/s130101085}, doi = {10.3390/S130101085}, timestamp = {Wed, 14 Nov 2018 10:45:25 +0100}, biburl = {https://dblp.org/rec/journals/sensors/NiYXZZLXL13.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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