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BibTeX record journals/mr/ZhuP15
@article{DBLP:journals/mr/ZhuP15, author = {Wenliang Zhu and Giuseppe Pezzotti}, title = {Raman spectroscopic assessments of structural orientation and residual stress in wurtzitic AlN film deposited on {(0} 0 1) Si}, journal = {Microelectron. Reliab.}, volume = {55}, number = {1}, pages = {66--73}, year = {2015}, url = {https://doi.org/10.1016/j.microrel.2014.10.001}, doi = {10.1016/J.MICROREL.2014.10.001}, timestamp = {Sat, 22 Feb 2020 19:29:25 +0100}, biburl = {https://dblp.org/rec/journals/mr/ZhuP15.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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