BibTeX record journals/mr/ZengSLS04

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@article{DBLP:journals/mr/ZengSLS04,
  author       = {Xiangbin Zeng and
                  X. W. Sun and
                  Junfeng Li and
                  Johnny K. O. Sin},
  title        = {Improving reliability of poly-Si TFTs with channel layer and gate
                  oxide passivated by NH\({}_{\mbox{3}}\)/N\({}_{\mbox{2}}\)O plasma},
  journal      = {Microelectron. Reliab.},
  volume       = {44},
  number       = {3},
  pages        = {435--442},
  year         = {2004},
  url          = {https://doi.org/10.1016/j.microrel.2003.10.007},
  doi          = {10.1016/J.MICROREL.2003.10.007},
  timestamp    = {Sat, 22 Feb 2020 19:27:59 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/ZengSLS04.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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