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BibTeX record journals/mr/YamadaMHFE01
@article{DBLP:journals/mr/YamadaMHFE01, author = {Takayuki Yamada and Masaru Moriwaki and Yoshinao Harada and Shinji Fujii and Koji Eriguchi}, title = {Effects of the sputtering deposition process of metal gate electrode on the gate dielectric characteristics}, journal = {Microelectron. Reliab.}, volume = {41}, number = {5}, pages = {697--704}, year = {2001}, url = {https://doi.org/10.1016/S0026-2714(00)00262-6}, doi = {10.1016/S0026-2714(00)00262-6}, timestamp = {Sat, 22 Feb 2020 19:27:54 +0100}, biburl = {https://dblp.org/rec/journals/mr/YamadaMHFE01.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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