BibTeX record journals/mr/WangCDL08

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@article{DBLP:journals/mr/WangCDL08,
  author       = {Ying Wang and
                  Fei Cao and
                  Minghui Ding and
                  Yun{-}Tao Liu},
  title        = {Diffusion barrier performance of Zr-N/Zr bilayered film in Cu/Si contact
                  system},
  journal      = {Microelectron. Reliab.},
  volume       = {48},
  number       = {11-12},
  pages        = {1800--1803},
  year         = {2008},
  url          = {https://doi.org/10.1016/j.microrel.2008.08.003},
  doi          = {10.1016/J.MICROREL.2008.08.003},
  timestamp    = {Thu, 21 Jan 2021 12:29:41 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/WangCDL08.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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