BibTeX record journals/mr/PinzelliGBVBG07

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@article{DBLP:journals/mr/PinzelliGBVBG07,
  author       = {L. Pinzelli and
                  M. Gros{-}Jean and
                  Y. Br{\'{e}}chet and
                  F. Volpi and
                  A. Bajolet and
                  J.{-}C. Giraudin},
  title        = {High-K dielectric deposition in 3D architectures: The case of Ta\({}_{\mbox{2}}\)O\({}_{\mbox{5}}\)
                  deposited with metal-organic precursor {TBTDET}},
  journal      = {Microelectron. Reliab.},
  volume       = {47},
  number       = {4-5},
  pages        = {700--703},
  year         = {2007},
  url          = {https://doi.org/10.1016/j.microrel.2007.01.066},
  doi          = {10.1016/J.MICROREL.2007.01.066},
  timestamp    = {Sat, 22 Feb 2020 19:28:56 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/PinzelliGBVBG07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}