BibTeX record journals/mr/OrLSKX03

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@article{DBLP:journals/mr/OrLSKX03,
  author       = {David C. T. Or and
                  Pui{-}To Lai and
                  Johnny K. O. Sin and
                  Paul C. K. Kwok and
                  Jing{-}Ping Xu},
  title        = {Enhanced reliability for low-temperature gate dielectric of {MOS}
                  devices by N\({}_{\mbox{2}}\)O or {NO} plasma nitridation},
  journal      = {Microelectron. Reliab.},
  volume       = {43},
  number       = {1},
  pages        = {163--166},
  year         = {2003},
  url          = {https://doi.org/10.1016/S0026-2714(02)00284-6},
  doi          = {10.1016/S0026-2714(02)00284-6},
  timestamp    = {Mon, 02 Oct 2023 20:48:15 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/OrLSKX03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}