BibTeX record journals/mr/DiestelMKSEMP01

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@article{DBLP:journals/mr/DiestelMKSEMP01,
  author       = {Gunnar Diestel and
                  Andreas Martin and
                  Martin Kerber and
                  Alfred Schlemm and
                  Horst Erlenmaier and
                  Bernhard Murr and
                  Andreas Preussger},
  title        = {Quality assessment of thin oxides using constant and ramped stress
                  measurements},
  journal      = {Microelectron. Reliab.},
  volume       = {41},
  number       = {7},
  pages        = {1019--1022},
  year         = {2001},
  url          = {https://doi.org/10.1016/S0026-2714(01)00061-0},
  doi          = {10.1016/S0026-2714(01)00061-0},
  timestamp    = {Thu, 11 Feb 2021 14:51:15 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/DiestelMKSEMP01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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