BibTeX record journals/mr/CantinLG09

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@article{DBLP:journals/mr/CantinLG09,
  author       = {C. Cantin and
                  C. Laviron and
                  G. Gove},
  title        = {Charging control on high energy implanters: {A} process requirement
                  demonstrated by plasma damage monitoring},
  journal      = {Microelectron. Reliab.},
  volume       = {49},
  number       = {2},
  pages        = {209--214},
  year         = {2009},
  url          = {https://doi.org/10.1016/j.microrel.2008.11.012},
  doi          = {10.1016/J.MICROREL.2008.11.012},
  timestamp    = {Sat, 22 Feb 2020 19:26:44 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/CantinLG09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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