BibTeX record journals/mj/ZhongWT06

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@article{DBLP:journals/mj/ZhongWT06,
  author       = {Z. W. Zhong and
                  Z. F. Wang and
                  Y. H. Tan},
  title        = {Chemical mechanical polishing of polymeric materials for {MEMS} applications},
  journal      = {Microelectron. J.},
  volume       = {37},
  number       = {4},
  pages        = {295--301},
  year         = {2006},
  url          = {https://doi.org/10.1016/j.mejo.2005.05.016},
  doi          = {10.1016/J.MEJO.2005.05.016},
  timestamp    = {Sat, 22 Feb 2020 19:34:00 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/ZhongWT06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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