BibTeX record journals/ieicet/OhtaKMHM11

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@article{DBLP:journals/ieicet/OhtaKMHM11,
  author       = {Akio Ohta and
                  Daisuke Kanme and
                  Hideki Murakami and
                  Seiichiro Higashi and
                  Seiichi Miyazaki},
  title        = {Characterization of Mg Diffusion into HfO\({}_{\mbox{2}}\)/SiO\({}_{\mbox{2}}\)/Si(100)
                  Stacked Structures and Its Impact on Detect State Densities},
  journal      = {{IEICE} Trans. Electron.},
  volume       = {94-C},
  number       = {5},
  pages        = {717--723},
  year         = {2011},
  url          = {https://doi.org/10.1587/transele.E94.C.717},
  doi          = {10.1587/TRANSELE.E94.C.717},
  timestamp    = {Sat, 11 Apr 2020 14:47:58 +0200},
  biburl       = {https://dblp.org/rec/journals/ieicet/OhtaKMHM11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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